Piezoceramic bending transducer and use thereof

ABSTRACT

The invention relates to a piezoelectric bending transducer ( 1 ), comprising a support body ( 3 ), a stack ( 4 ) of piezoceramic layers ( 6 ), arranged thereon and flat electrodes ( 7, 8 ) arranged between the layers ( 6 ). On the side of the support body ( 3 ) facing the stack ( 4 ) an adaptation layer ( 10 ) is arranged with essentially the same coefficient of expansion as the piezoceramic. The bending transducer ( 1 ) displays a good actuating power and a low thermal natural distortion with economical production costs. Said transducer is particularly suitable for application in a valve.

[0001] The invention relates to a piezoceramic bending transducer having a support body and having a stack of layers comprising piezoceramic and comprising planar electrodes arranged between the layers, which stack is applied to the support body. The invention also relates to the use of a bending transducer of this type.

[0002] A piezoceramic bending transducer of this type is known from DE 293 918 A5 and WO 99/17383. According to WO 99/17383, to actuate the piezoceramic bending transducer, the electrodes arranged between the layers of piezoceramic are alternately set to positive and negative potential, as seen in the stacking direction. Respectively adjacent layers of piezoceramic are polarized in opposite directions, so that the stack as a whole, when the operating voltage is applied, undergoes either a contraction or an expansion on account of the piezoelectric effect of the piezoceramic.

[0003] Further possible ways of actuating a stack comprising layers of piezoceramic of this type are known from DE 34 34 726 C2.

[0004] Furthermore, DE 34 34 726 has disclosed, as material for the piezoceramic in the layers, lead titanate, barium titanate, lead zirconium titanate or modifications of the ceramic substances. As material for the support body, DD 293 918 A5 has disclosed spring steel, and WO 97/17383 has disclosed a fiber composite material or glass. The support body made from a fiber composite material or from glass leads to a good efficiency for the conversion of electrical energy into mechanical energy.

[0005] A piezoelectric bending transducer with a support body is generally constructed as what is known as a trimorph. What this means is that the support body is coated on both sides with in each case at least one piezoelectrically active layer of piezoceramic. On account of the symmetrical structure, the temperature-induced internal bending of a piezoceramic bending transducer of this type is lower than if the support body were to be coated on only one side.

[0006] If a stack comprising a large number of piezoceramic layers is used instead of a single piezoceramic layer, the same mechanical energy is provided at a lower operating voltage. The reason for this is that, on account of the low thickness of the individual piezoceramic layers in a stack, at the same operating voltage in accordance with E=U/d, where E is the electric field, U is the applied voltage and d is the thickness of the ceramic layer, a greater electrical field strength results than if a single layer of the same thickness of the stack is used. Building up the piezoelectrically active substance in the form of a stack with a large number of individual layers of piezoceramic, i.e. in multilayer technology, is advantageous if short displacement paths and high displacement forces are required for the piezoceramic bending transducer.

[0007] For the latter reason, piezoceramic bending transducers of stacked or multilayer design are preferred in particular for applications in a valve. However, a drawback is that the production and materials costs for a piezoceramic bending transducer of multilayer design are relatively high. The piezoceramic layers have to be drawn as films; a large number of individual electrode layers are required, and this fact increases the materials costs (AgPd). Accordingly, when a piezo ceramic bending transducer of multilayer design is used, a valve, despite having better actuation properties, would not be competitive compared to a similar valve of conventional design, on account of the high unit price.

[0008] Therefore, it is an object of the invention to provide a piezoceramic bending transducer of multilayer design which can be produced at low cost. A further object of the invention is to provide a use for a piezoceramic bending transducer of this type.

[0009] For a piezoceramic bending transducer of the type described in the introduction, the first object is achieved, according to the invention, by the fact that a matching layer comprising a material which has substantially the same coefficient of thermal expansion as the piezoceramic bending is applied to that side of the support body which is remote from the stack.

[0010] The invention is-based on the consideration that, when the piezoceramic bending transducer is used in a valve, only two defined positions of the bending transducer are required. In one defined position of the bending transducer, the valve must be closed, and in the other defined position of the bending transducer, the valve must be open. There is no need for a further, third defined position of the bending transducer. Depending on the way in which the bending transducer is actuated, one speaks of a normally open valve, in the valve is open when the bending transducer is not actuated, and of a normally closed valve, if the valve is closed when the bending transducer is not actuated.

[0011] Furthermore, the invention is based on the consideration that the two positions of the piezoceramic bending transducer which are required in order to control a valve are defined by its at-rest position when voltage is not applied and by a diverted position when voltage is applied. Accordingly, all that is required is for the bending transducer to deviate in one direction. Therefore, for a bending transducer which is used in a valve, it is sufficient for the stack comprising layers of piezoceramic, referred to below as the piezostack, to be applied to one side of the support body. This is because a second piezostack, which is actuated in the opposite direction to the polarisation direction, makes only a small contribution to the deviation, since the field strength has to be limited on account of dipolarization effects. Accordingly, one piezostack can be dispensed with without restricting the performance of the bending transducer for use in valves. This represents a cost-cutting measure, since the production of a piezostack, comprising a large number of individual piezoceramic layers with electrodes between them, is expensive.

[0012] Furthermore, the invention is based on the consideration that a piezoceramic bending transducer having a support body and a piezostack applied to one side thereof, on account of its asymmetrical structure, has a higher thermally induced internal bending than a bending transducer having a support body and piezostacks applied to both sides of this body, and to this extent would be unsuitable for use in a valve. This problem is solved by the fact that a matching layer comprising a material with substantially the same coefficient of thermal expansion as the piezoceramic is applied to that side of the support body which is remote from the stack.

[0013] The matching layer advantageously consists of a glass or an aluminum oxide. These two materials have a similar coefficient of thermal expansion to the lead zirconate titanium oxide ceramic which is customarily used as piezoceramic.

[0014] A piezo ceramic generally acquires its piezoelectric properties through being polarized in a homogeneous electrical field. A change in the coefficient of thermal expansion of the piezoceramic is associated with the polarization. In a further advantageous configuration of the invention, therefore, the matching layer consists of a polarized piezoceramic, in order to compensate for the thermally induced internal bending of the bending transducer. In this case, the coefficient of thermal expansion of the matching layer is identical to the coefficient of thermal expansion of the individual layers of piezoceramic in the stack which has been applied to the other side of the support body. In this case, the matching layer consists of a monolithic polarized piezoceramic, i.e. of a single layer of piezoceramic.

[0015] By way of example, the material used for the support body may be glass, metal or a fiber composite material. However, with a view to ease of processing and to achieving a permanent bond between piezoceramic and support body, it has proven advantageous for the support body to consist of a fiber composite material.

[0016] In particular, a permanent and secure bond between a piezoceramic and the support body can be formed if the fiber composite material is an epoxy resin reinforced with carbon or glass fibers. In this case, to produce such a material, the starting material used for the support body is an epoxy resin prepreg (an as yet uncured blank) which is thermally bonded to the piezoceramic by a heat treatment.

[0017] In a further advantageous configuration of the invention, a free part of the support body, on a securing side, extends beyond the stack and beyond the matching layer. The free part of the support body can easily be used to secure the bending transducer. This configuration also allows simple contact to be made with the individual electrodes in the piezostack. By way of example, a small copper plate may be adhesively bonded to the free part of the support body, this plate extending partially beneath the piezostack, where it makes electrical contact with the respective electrodes. Then, a connection wire can easily be soldered onto this small copper plate.

[0018] Advantageously, the electrodes are guided out of the piezoceramic on the securing side, in order for electrical contact to be made, and are set back with respect to the piezoceramic on the other sides. In this way, the electrodes, which are designed as a sheet-like metallization, only lead out of the piezostack or out of the matching layer on the securing side. When the piezostack is being sintered together, the set-back position of the electrodes leads to the formation of a sintered skin on the outer sides, which tightly seals off the electrodes from the environment after the sintering process has concluded. Therefore, designing the electrodes in this way within the piezostack allows the piezoceramic bending transducer to operate even under high levels of atmospheric humidity or in water. The individual electrodes are very well electrically insulated from one another by the sintered skin, which increases the protection against short circuit in the piezostack.

[0019] Furthermore, with regard to the prevention of short circuit in the piezoceramic bending transducer, it is advantageous if the part of the electrodes which leads out of the piezostack or potting compound is sealed on the securing side by a potting compound. For this purpose, the bending transducer is placed into a mold which is then filled with the potting compound.

[0020] With a view to ease of handling, it is advantageous if the potting compound is an epoxy resin. It is also possible for adhesives which can be cured in particular by means of a laser to be used as potting compound. Surrounding the bending transducer with a potting compound means that the entire piezoceramic bending transducer is protected against moisture, and can therefore itself be used in liquid-carrying valves.

[0021] With regard to the use, the object set in the introduction is achieved, according to the invention, by the piezoceramic bending transducer as described in patent claims 1 to 9 being used as an actuator in a valve, in particular in a pneumatic valve. A valve of this type, on account of its good price/performance ratio, is able to compete with a conventional valve. Exemplary embodiments of the invention are explained in more detail with reference to a drawing, in which:

[0022]FIG. 1 shows a longitudinal section through a piezoceramic bending transducer having a support body, which on one side is coated with a stack comprising layers of piezoceramic and on the other side is coated with a matching layer in the form of a monolithic piezoceramic,

[0023]FIG. 2 shows a cross section through the piezoceramic bending transducer as shown in FIG. 1, and

[0024]FIG. 3 shows a three-dimensional illustration of the securing side of the piezoceramic bending transducer shown in FIG. 1.

[0025]FIG. 1 shows a longitudinal section through a piezoceramic bending transducer 1 having a support body 3 made from an epoxy resin reinforced with glass fibers. A stack 4 comprising a number of layers 6 of piezoceramic in each case having electrodes 7, 8, in the form of a silver/palladium metallization layer, arranged between them, is applied to one side of the support body 3. A matching layer 10 comprising a monolithic piezoceramic is applied to that side of the support 3 which is remote from the stack 4.

[0026] A free part of the support body 3 extends outward on the securing side 12 of the piezoceramic bending transducer 1. As can be seen in the longitudinal section, parts 13 of the electrode 8 lead outward from the stack 4 on the securing side 12, where they are in electrical contact with one another. Although this is not visible in the longitudinal section shown, the electrodes 7 also lead outward in the same way and are likewise in contact with one another elsewhere (cf.

[0027]FIG. 2). The part 13 of the electrodes 7, 8 which leads outward is sealed on the securing side 12 with a potting compound 14 comprising epoxy resin.

[0028] Furthermore, the stack 4 has an inner electrode 16, which faces the support body 3, and an outer electrode 18, likewise in the form of a silver/palladium metallization. The inner and outer electrodes 16 and 18 may also be omitted. This is advantageous, for example, when the bending transducer is operated in a moist environment. The matching layer 10 is also provided with an inner electrode 15 and an outer electrode 17. Both the layers 6 of piezoceramic of the stack 4 and the monolithic piezoceramic of the matching layer 10 are polarized when a predetermined voltage is applied via the electrodes 7 and 8, 16 and 18, and 15 and 17. Therefore, the matching layer 10 has the same coefficient of thermal expansion as the layers 6 of piezoceramic. The piezoceramic used is a lead zirconate titanium oxide ceramic.

[0029] A small copper plate 19, which extends partially beneath the stack 4, is adhesively bonded to the support body 3 on the securing side 12 of the piezoceramic bending transducer 1. Beneath the stack, the small copper plate 19 is in electrical contact with the electrodes 8, as can be seen from the longitudinal section. To supply the electrodes 8 with a voltage, a connection cable is soldered onto the small copper plate 19.

[0030]FIG. 2 shows a cross section through the piezoceramic bending transducer shown in FIG. 1. The cross section is selected in such a way that it is possible to see an electrode 7 as shown in FIG. 1. It can clearly be seen that, to make contact with the electrodes 7, a small copper plate 19 a is used and, to make contact with the electrodes 8, a small copper plate 19 b is used. For this purpose, an electrode part 20 leads out of the stack, and on the outside makes contact with the small copper plate 19 a. The small copper plates 19 a and 19 b are adhesively bonded onto the free part 21 of the support body.

[0031] Furthermore, it is clear that the electrodes—the electrodes 7 are illustrated—are set back with respect to the layers of piezoceramic 6 on the sides 22, 24 and 26. This set-back arrangement improves the protection against short circuits in the piezoceramic bending transducer when moisture is present. The free part 21 of the support body 3 is shown in a perspective illustration in FIG. 3. It is clearly apparent that the small copper plate 19 a is in electrical contact with all the electrodes 8 and the small copper plate 19 b is in electrical contact with all the electrodes 7. If a voltage is applied between the small copper plates 19 a and 19 b, the electrical field runs in opposite directions in adjacent layers 6 of piezoceramic. Since the polarization directions of adjacent layers 6 of piezoceramic likewise face in opposite directions, the application of an electric voltage accordingly leads to a contraction or an expansion of all the layers 6 of the stack 4 and therefore to an overall contraction or expansion of the stack 4. If the free part 21 of the support body 3 is held fixedly in place, the application of a voltage to the small copper plates 19 a and 19 b therefore leads to a deviation of the other end of the bending transducer 1.

[0032] Furthermore, it can also be seen from FIG. 3 that the piezoceramic of the matching layer 10 can likewise be polarized by means of the small copper plates 19 c and 19 d when a voltage is applied. 

1. A piezoceramic bending transducer (1) having a support body (3) and having a stack of layers (6) comprising piezoceramic and comprising planar electrodes (7, 8) arranged between the layers (6), which stack is applied to the support body, characterized in that a matching layer (10) comprising a material which has substantially the same coefficient of thermal expansion as the piezoceramic bending is applied to that side of the support body (3) which is remote from the stack.
 2. The piezoceramic bending transducer (1) as claimed in claim 1, characterized in that the matching layer (10) consists of a glass or an aluminum oxide.
 3. The piezoceramic bending transducer (1) as claimed in claim 1, characterized in that the matching layer (10) consists of a polarized piezoceramic.
 4. The piezoceramic bending transducer (1) as claimed in one of claims 1 to 3, characterized in that the support body (3) consists of a fiber composite material.
 5. The piezoceramic bending transducer (1) as claimed in claim 4, characterized in that the fiber composite material is an epoxy resin reinforced with carbon or glass fibers.
 6. The piezoceramic bending transducer (1) as claimed in one of the preceding claims, characterized in that a free part (21) of the support body (3), on a securing side (12), extends beyond the stack and beyond the matching layer (10).
 7. The piezoceramic bending transducer (1) as claimed in claim 6, characterized in that the electrodes (7, 8) lead out of the piezoceramic on the securing side (12), in order for electrical contact to be made, and are set back with respect to the piezoceramic on the other sides (22, 24, 26).
 8. The piezoceramic bending transducer (1) as claimed in claim 7, characterized in that the projecting part (20) of the electrodes (7, 8) is sealed on the securing side (12) with a potting compound (14).
 9. The piezoceramic bending transducer (1) as claimed in claim 8, characterized in that the potting compound (14) is an epoxy resin.
 10. The use of the piezoceramic bending transducer (1) as claimed in one of the preceding claims as actuator in a valve, in particular in a pneumatic valve. 